ZJL Evaporation Magnetron Sputtering Coating Machine

The structure simple reasonable, the production efficiency is high, the area is small, simplicity of operator.ZJL Evaporation Ma

Coating MachineName:ZJL Evaporation Magnetron Sputtering Coating Machine Introduction: This machine is a kind of vertical type decoration vacuum coater working by means of both evaporation and magnetron sputtering. It is mainly adopted in the surface metallic processing of plastic, ceramic, metal and glass materials. Being a vertical type coater, it has all the advantages of horizontal type coater, and can load heavy work pieces.Main Features:1. using developed type of high vacuum system, quicker pumping down speed, higher efficiency, saving power, low noise and long service time.2. The vacuum system is equipped with components such as high vacuum value, high vacuum oil diffusion pump, Roots vacuum pump, and mechanical vacuum pump with rotary blades.3. The power supply for metallization includes DC cylindrical target power supply, DC high voltage bombardment power supply, and medium frequency power supply.4. The cooling system is equipped with an automatic hydraulic pressure deficiency alarm device according to the design requirement.5. The electrical control system is designed to have multiple protecting devices (for hydraulic pressure, power failure and incorrect operation) to control the entire production process automatically (with touch screen and PLC). Equipment Configuration1. The vacuum chamber is made of high quality stainless steel (SUS304), a vertical type, single door structure.2. The vacuum system is equipped with components such as high vacuum value, high vacuum oil diffusion pump, Roots vacuum pump, and mechanical vacuum pump, and one water vapor cryopump.3. The power supply for metallization includes DC cylindrical target power supply, DC high voltage bombardment power supply, and medium frequency power supply.4. The cooling system is equipped with an automatic hydraulic pressure deficiency alarm device according to the design requirement.5. The electrical control system is designed to have multiple protecting devices (for hydraulic pressure, power failure and incorrect operation) to control the entire production process automatically (with touch screen and PLC). Technical Parameters: Item ZJL-1000 ZJL-1200 ZJL-1400 ZJL-1600 Pumping time (new, idling) 2×10-2Pa8min 2×10-2Pa10min Ultimate vacuum(new, idling) ≤8×10-4Pa Work piece rotating speed 020r/min Weight(Kg) 4000KG 5000KG 6300KG 7120KG Dimension (m) 3.2 X 5 X 2.6M 4.2 X 5 X 2.6M 4.6 X 6 X 3.2M 5 X 7 X 3.3M

ZJL Evaporation Magnetron Sputtering Coating Machine